Materials Deposition

Functional materials are developed using two sputtering equipments, a first classical one (Plassys, one deposition chamber, eight targets) and a multichamber one (Actemium, one deposition chamber and one treatment chamber, twelve targets). Besides classical magnetic materials (multilayers, spin valves), we are also studying more advanced materials like magnetic tunnel junctions or perpendicular structures for different types of applications (perpendicular polarizers for RF applications, (Spin Transfer) [1, 2], magnetic tunnel junctions with perpendicular anisotropy for advanced MRAM’s (MRAM and Logic) [3]).